Positioning, Distance, Displacement, Run out, Autofocus, Nulling, Stage vibration, Media thickness
Capacitive Sensors
KLA’s portfolio of capacitive sensors enable detection and measurement of proximity, positioning, distance, displacement, run out, autofocus, nulling, vibrations and thickness. Our non-contact, low-noise, high-performance sensors are used by OEMs (semiconductor equipment, automated microscopy, automotive components, photovoltaic) and production end users (data storage, automotive drive train components) for a range of applications, including direct measurements of straightness and flatness of high precision machine tools and stages, and use as a position sensor for focal plane control. Our capacitive sensors also serve an array of industrial test and measurement, and research and development use cases.
MicroSense® Capacitive Sensors
Non-contact Position Measurement
MicroSense® capacitive sensors utilize innovative technology to achieve high-performance measurement capabilities. With down to picometer resolution, MicroSense capacitive sensors offer the lowest noise performance of any commercially available capacitive sensor. Several application-specific capacitive position sensors are available, with each optimized for either high stability and linearity or the highest measurement bandwidth for fast response.
All MicroSense capacitive sensors feature:
- Completely non-contact capacitive position measurement using accurate electrical sensing technology
- Detection of any conductive, grounded target with surface finish or material having no effect on accuracy
- Short measurement ranges, 10µm up to 4mm, depending on sensor size
MicroSense 4800 Series
A versatile, all-around position sensor designed for the best linearity and stability.
MicroSense 5800 Series
A high resolution sensor with measurement bandwidth up to 100kHz. Designed for high dynamic applications, these sensors reliably measure even poorly grounded targets such as air-bearing spindles and motors.
MicroSense 6800 Series
A ultra-low noise sensor with picometer resolution and a state-of-the-art design that provides high resolution with increased standoff from the sensor to the target.
MicroSense 8800 Series
A low noise sensor with sub-nanometer resolution and measurement bandwidth up to 20kHz, designed for best linearity and stability, and ideal for servo system position feedback and fast tool servo applications.
MicroSense Mini
A compact, cost effective, nano-positioning sensor for original equipment manufacturers, ideal for use in piezo-driven flexure stages and other short-travel nano-positioners.
MicroSense Spin Check Spindle Metrology System
System that supports measurement of repeatable run-out and non-repeatable run-out of hard disk drive spindle motors and other precision, rotating mechanisms.
MicroSense Sensors for Measurement in Vacuum Environments
Low out-gassing sensors that serve ultra-clean, high vacuum, and ultra-high vacuum applications.
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