MicroSense 5430 High Resolution Displacement Measurement System

 

Product Highlights:

• Three independent, high resolution measurement channels in a single portable instrument
• Nanometer resolution, non-contact linear displacement measurement technology
• Provides a true planar measurement - target material, surface finish or reflectivity has no effect on measurement accuracy
• Ideal for high dynamic measurements - selectable measurement bandwidth of 1, 5, 20 or 100 kHz
• AC/DC coupling selector - remove DC offset when making dynamic measurements of rotating high speed spindles
• Simple setup - front panel offset adjustment for easy measurement probe setup
• Selectable measurement sensitivity - 1x, 5x, or 10x

Nanometer resolution, non-contact measurement

The MicroSense 5430 is a 3 channel, high resolution linear displacement measurement instrument. Based upon ADE's patented capacitive displacement measurement technology, the 5430 provides unsurpassed measurement resolution - down to the nanometer level.

Used by OEMs worldwide for production measurement of machine tools, high speed spindles, air bearings, semiconductor fabrication equipment and precision X-Y stages. Measurement applications include high speed spindle runout measurement, machine tool straightness and flatness measurement and precision stage vibration measurement.

Included with the system:

• Non-contact measurement probes are available with a variety of sensor sizes. Each probe has a 3 meter cable for connection to the 5430 instrument.