Measurements in High Vacuum and Low Outgassing Environments

ADE non-contact capacitive gauging systems and capacitive sensors are used to make very precise measurements down to the nanometer level in vacuum and low outgassing environments.

Our products have been used successfully in FIB (Focused Ion Beam) systems, SEM (scanning Electron Microscope) systems and Wafer Steppers, including EUV Steppers.

Our 2800 series of passive capacitive probes have no electronics in the probe structure. Vacuum compatible probes are made out of a variety of vacuum compatible materials including stainless steel, Kapton and alumina ceramic. Vacuum compatible materials are used for probe connections and cables.