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Focal Plane Control

When capacitive sensors used for focal plane control

Capacitance gauges from ADE are widely used in a variety of focal plane control, or nulling, applications in both atmospheric and vacuum environments.

Typically these applications require that system optics be repeatably positioned relative to a part under inspection at the micron or sub-micron level, while the part under inspection is being rapidly moved under the system optics.

In focal plane control applications, the gauge is used as a feedback sensor for a servo loop which maintains the required offset between the system optics and the part under inspection. Since ADE capacitance gauges are high bandwidth, stable and repeatable, maximum system throughput is achieved.

 

Download our application notes PDF:

Using Capacitance Gauges for Tool Head and Focal Plane Control

[Extract:] "Capacitive gages are frequently used in applications where excellent linearity and repeatability are required to make very precise measurements. A slightly different use is one in which a user wants to repeatably position a tool or quickly reestablish focus after moving a workpiece. These are often referred to as nulling applications because the probe is used to bring the tool-toworkpiece distance to the same (null) value. Therefore, stability and repeatability are of prime importance, but..." 

 

Products related to this application:

 

Microsense II Model 4810/4800

Microsense II Model 5810/5800

 

Other applications related to this one:

 

Piezo actuator positioner control

Fast tool servo control

Vibration analysis

 

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