Piezo Actuator and Nanopositioner Control

Capacitance sensors from ADE are ideal for providing servo system feedback in piezo motor driven nanopositioning applications.

Nanopositioners are typically one, two or three axis positioners which provide travels in the order of a few hundred micrometers per axis. Nanopositioners are generally constructed with flexural ways machined from solid blocks of metal, in order to provide very pure motion with minimal off axis motion.

Actuators are either piezo motors or voice coils. Capacitance sensors provide the following advantages when used as feedback devices in nanopositioners:

The resolution of the capacitance sensor is at the nanometer level.
For scanning applications, capacitance sensors provide exceptionally linearity, and eliminate the cyclical errors associated with optical encoders.
For applications requiring high stability in position, capacitance sensors are very stable, and can be built from materials which are essentially athermal.

Products related to this application

Microsense II Model 4810/4800

Microsense II Model 5810/5800

Other applications related to this one:

Fast tool servo with capacitance gauge sensors

Focal plane control with capacitive sensor

For more information on this application:

Please fill out the following information and press the SUBMIT button

Your Name*
E-mail*
Telephone*
Fax:
Company
Address1
Address2
City
State/Region
Zip/Mailing code
Country

Do you have any specific comments or requests?

How did you hear about us?
(Check all that apply)

Business Associate
Internet Search
Magazine Ad
Trade Show Booth


Copyright © 2008, KLA-Tencor Corporation, and/or its licensors, All Rights Reserved.	Search ADE: