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Thickness Measurement

Capacitive gauges for thickness measurement

  • Capacitance thickness measurements of semiconductor wafers are done by ADE's UltraGage, and the automated AFS.

 

Capacitance gages and sensors from ADE are used to make very precise thickness measurements of semiconductor wafers, as well as Hard Disk Drive platters and similar components, including continuous sheet material.

Thickness of non-conductive materials can also be measured using capacitance gauges. Since capacitive gauges are non-contact and have very high measurement bandwidth, they are ideal for applications requiring hundreds or thousands of measurements per hour.  

 

For information on how capacitance sensors can measure non-conductive materials, read our application note:

Measuring Non-Conductive Materials (pdf)

 

Products related to this application

Microsense II Model 4810/4800

5430 Compact Console

Microsense II Model 5810/5800

 

Other applications related to this one:

Hard disk platter thickness using capacitive gauge

CD stamper thickness using capacitance sensors

 

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