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Structural Vibration AnalysisUsing capacitance gage sensors for structural analysis measurment
Excessive structural vibration has a negative effect on the performance of a variety of high performance machines, including machine tools, high speed printing equipment and semiconductor fabrication equipment. Capacitive gauges and capacitive sensors from ADE are used to measure structural vibration in such systems, in order to verify desired system performance. For example, maximizing throughput in a variety of scanning systems is dependent upon minimizing vertical vibration relative to system optics. A capacitance gauge with a target set up at the point of interest provides the user with a powerful diagnostic tool when evaluating the structural rigidity of scanning systems. Repeatibility & Vibration Measurement
The MicroSense 5430 can directly measure machine repeatablity and vibration. ADE’s compact measurement probes can directly measure at the point of interest. For example, vibration can be measured at the tooling mounting surface, such as a machine tool fixture or a wafer chuck mounted on a precision stage.
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Products related to this applicationMicroSense 5430 capacitance system
Other applications related to this one:Air bearing spindle vibration analysis |
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